Some equipment had been damaged and the company was still analysing the impact on production, Toshiba said in a statement.
The plant makes system LSI chips<\/a>, around 60% of which are sold to carmakers and industrial machinery makers, a spokesperson for Toshiba Electronic Devices<\/a> & Storage Corp said.
Toshiba does not yet know when it can restart production and will likely provide an update on Tuesday, he added.
The company also makes system LSI chips at a factory in northern Japan, with other domestic producers, such as Renesas Electronics<\/a>, also building the devices.
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